Substrate holder for use in a lithographic apparatus

ABSTRACT

A substrate holder for use in a lithographic apparatus and configured to support a substrate, the substrate holder having a main body having a main body surface, a plurality of main burls projecting from the main body surface, wherein each main burl has a distal end surface configured to support the substrate, a first seal member projecting from the main body surface and having an upper surface, the first seal member surrounding the plurality of main burls and configured to restrict the passage of liquid between the substrate and the main body surface radially inward past the first seal member, and a plurality of minor burls projecting from the upper surface of the first seal member, wherein each minor burl has a distal end surface configured to support the substrate.

This application is a continuation of U.S. patent application Ser. No.17/481,978, filed Sep. 22, 2021, which is a continuation of U.S. patentapplication Ser. No. 16/650,939, filed Mar. 26, 2020, now U.S. Pat. No.11,139,196, which is the U.S. national phase entry of PCT PatentApplication No. PCT/EP2018/075293, filed Sep. 19, 2018, which claims thebenefit of priority of European Patent Application No. 17196086.7, filedon Oct. 12, 2017, and of European Patent Application No. 18163985.7,filed on Mar. 26, 2018, each of the foregoing applications isincorporated herein in its entirety by reference.

FIELD

The present description relates to a substrate holder for use in alithographic apparatus.

BACKGROUND

A lithographic apparatus is a machine constructed to apply a desiredpattern onto a substrate. A lithographic apparatus can be used, forexample, in the manufacture of integrated circuits (ICs). A lithographicapparatus may, for example, project a pattern (also often referred to as“design layout” or “design”) of a patterning device (e.g., a mask) ontoa layer of radiation-sensitive material (resist) provided on a substrate(e.g., a wafer).

As semiconductor manufacturing processes continue to advance, thedimensions of circuit elements have continually been reduced while thenumber of functional elements, such as transistors, per device has beensteadily increasing over decades, following a trend commonly referred toas ‘Moore's law.’ To keep up with Moore's law the semiconductor industryis chasing technologies that enable to create increasingly smallerfeatures. To project a pattern on a substrate a lithographic apparatusmay use electromagnetic radiation. The wavelength of this radiationdetermines the minimum size of features which are patterned on thesubstrate. Typical wavelengths currently in use are 365 nm (i-line), 248nm, 193 nm and 13.5 nm. A lithographic apparatus, which uses extremeultraviolet (EUV) radiation, having a wavelength within a range of 4 nmto 20 nm, for example 6.7 nm or 13.5 nm, may be used to form smallerfeatures on a substrate than a lithographic apparatus which uses, forexample, radiation with a wavelength of 193 nm.

In an immersion lithographic apparatus an immersion liquid is interposedin a space between a projection system of the apparatus and a substrate.This immersion liquid can find its way past the edge of the substrate toan under surface of the substrate. This can be deleterious due tocontamination of the under surface of the substrate resulting from thisimmersion liquid and/or due to thermal loads applied to the undersurface of the substrate at positions close to the edge of thesubstrate, due to evaporation of the immersion liquid. A substrateholder which is configured to support the substrate can have featureswhich reduce the quantity and/or distance the immersion liquid movesradially inwardly along the under surface of the substrate. Suchfeatures can deleteriously affect the achieved flatness and cleanlinessof the substrate as well as the ease of removal.

SUMMARY

It is an object of the present invention to provide a substrate holderwith an acceptable compromise between performance of the substrateholder in terms of flatness and cleanliness of the substrate andreduction of the passage of the immersion liquid along the under surfaceof the substrate.

In an embodiment of the present invention there is provided a substrateholder for use in a lithographic apparatus and configured to support asubstrate, the substrate holder comprising: a main body having a mainbody surface; a plurality of main burls projecting from the main bodysurface, wherein each main burl has a distal end surface configured tosupport the substrate: a first seal member projecting from the main bodysurface and having an upper surface, the first seal member surroundingthe plurality of main burls and configured to restrict the passage ofliquid between the substrate and the main body surface radially inwardpast the first seal member; and a plurality of minor burls projectingfrom the upper surface of the first seal member, wherein each minor burlhas a distal end surface configured to support the substrate.

In an embodiment of the present invention, there is provided a substrateholder for use in a lithographic apparatus and configured to support asubstrate, the substrate holder comprising: a main body having a mainbody surface; a plurality of main burls projecting from the main bodysurface, wherein each main burl has a distal end surface configured tosupport the substrate: a first seal member projecting from the main bodysurface and having an upper surface, the first seal member surroundingthe plurality of main burls and configured to restrict the passage ofliquid between the substrate and the main body surface radially inwardpast the first seal member; a second seal member projecting from themain body surface, the second seal member surrounding the first sealmember and configured for restricting the passage of liquid between thesubstrate and the main body surface radially inward past the second sealmember; a plurality of extraction openings formed in the main bodybetween the first seal member and the second seal member for theextraction of fluid into the main body from between the main body andthe substrate; and a plurality of outer burls projecting from the mainbody surface between the first seal member and the second seal member,each outer burl having a distal end surface configured to support thesubstrate; wherein the plurality of outer burls and the plurality ofextraction openings are arranged alternately in a line surrounding thefirst seal member and the plurality of main burls.

In an embodiment of the present invention, there is provided a substrateholder for use in a lithographic apparatus and configured to support asubstrate, the substrate holder comprising: a main body having a mainbody surface; a plurality of main burls projecting from the main bodysurface, wherein each main burl has a distal end surface configured tosupport the substrate: a first seal member projecting from the main bodysurface and having an upper surface, the first seal member surroundingthe plurality of main burls and configured to restrict the passage ofliquid between the substrate and the main body surface radially inwardpast the first seal member; a plurality of minor burls projecting fromthe upper surface of the first seal member, wherein each minor burl hasa distal end surface configured to support the substrate; a second sealmember projecting from the main body surface, the second seal membersurrounding the first seal member and configured for restricting thepassage of liquid between the substrate and the main body surfaceradially inward past the second seal member; a third seal memberprojecting from the main body surface, the third seal member surroundingthe first seal member and the second seal member and configured forrestricting the passage of liquid between the substrate and the mainbody surface radially inward past the third seal member; a plurality ofinlet openings formed in the main body between the first seal member andthe second seal member; and a plurality of extraction openings formed inthe main body between the second seal member and the third seal memberfor the extraction of fluid into the main body from between the mainbody and the substrate.

In an embodiment of the present invention, there is provided a substrateholder for use in a lithographic apparatus and configured to support asubstrate, the substrate holder comprising: a main body having a mainbody surface; a plurality of main burls projecting from the main bodysurface, wherein each main burl has a distal end surface configured tosupport the substrate; a seal member projecting from the main bodysurface and having an upper surface, the seal member surrounding theplurality of main burls; a plurality of extraction openings formed inone or more first recesses in the upper surface of the seal member; aplurality of inlet openings formed in one or more second recesses in theupper surface of the seal member; a barrier between the one or morefirst recesses and the one or more second recesses and configured torestrict the passage of liquid between the substrate and the main bodysurface radially inward past the barrier.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the invention will now be described, by way of exampleonly, with reference to the accompanying schematic drawings, in which:

FIG. 1 depicts a schematic overview of a lithographic apparatus;

FIGS. 2 a and 2 b depict, in cross section, two different versions of afluid handling structure with different features illustrated on theleft-hand side and the right-hand side, which may extend around thecomplete circumference;

FIG. 3 depicts a schematic overview of an edge of a substrate holder 200according to the present invention;

FIG. 4 depicts a schematic overview of an edge of a substrate holder 200according to the present invention;

FIG. 5 depicts a schematic overview of an edge of a substrate holder 200according to the present invention;

FIG. 6 depicts a schematic overview of an edge of a substrate holder 200according to the present invention;

FIG. 7 depicts a schematic overview of an edge of a substrate holder 200according to the present invention;

FIG. 8 depicts a schematic overview of an edge of a substrate holder 200according to an embodiment of the present invention;

FIG. 9 depicts a schematic overview of an edge of a substrate holder 200according to the present invention;

FIG. 10 depicts a schematic overview of an edge of a substrate holder200 according to the present invention;

FIG. 11 depicts a schematic overview of an edge of a substrate holder200 according to the present invention;

FIG. 12 depicts a schematic overview of an edge of a substrate holder200 according to the present invention; and

FIG. 13 depicts a schematic overview of an edge of a substrate holder200 according to the present invention.

DETAILED DESCRIPTION

In the present document, the terms “radiation” and “beam” are used toencompass all types of electromagnetic radiation, including ultravioletradiation (e.g. with a wavelength of 365, 248, 193, 157 or 126 nm).

The term “reticle”, “mask” or “patterning device” as employed in thistext may be broadly interpreted as referring to a generic patterningdevice that can be used to endow an incoming radiation beam with apatterned cross-section, corresponding to a pattern that is to becreated in a target portion of the substrate. The term “light valve” canalso be used in this context. Besides the classic mask (transmissive orreflective, binary, phase-shifting, hybrid, etc.), examples of othersuch patterning devices include a programmable mirror array and aprogrammable LCD array.

FIG. 1 schematically depicts a lithographic apparatus. The lithographicapparatus includes an illumination system (also referred to asilluminator) IL configured to condition a radiation beam B (e.g., UVradiation or DUV radiation), a mask support (e.g., a mask table) MTconstructed to support a patterning device (e.g., a mask) MA andconnected to a first positioner PM configured to accurately position thepatterning device MA in accordance with certain parameters, a substratesupport (e.g., a wafer table) WT constructed to hold a substrate (e.g.,a resist coated wafer) W and connected to a second positioner PWconfigured to accurately position the substrate support WT in accordancewith certain parameters, and a projection system (e.g., a refractiveprojection lens system) PS configured to project a pattern imparted tothe radiation beam B by patterning device MA onto a target portion C(e.g., comprising one or more dies) of the substrate W.

In operation, the illumination system IL receives the radiation beam Bfrom a radiation source SO, e.g. via a beam delivery system BD. Theillumination system IL may include various types of optical components,such as refractive, reflective, magnetic, electromagnetic,electrostatic, and/or other types of optical components, or anycombination thereof, for directing, shaping, and/or controllingradiation. The illuminator IL may be used to condition the radiationbeam B to have a desired spatial and angular intensity distribution inits cross section at a plane of the patterning device MA.

The term “projection system” PS used herein should be broadlyinterpreted as encompassing various types of projection system,including refractive, reflective, catadioptric, anamorphic, magnetic,electromagnetic and/or electrostatic optical systems, or any combinationthereof, as appropriate for the exposure radiation being used, and/orfor other factors such as the use of an immersion liquid or the use of avacuum. Any use of the term “projection lens” herein may be consideredas synonymous with the more general term “projection system” PS.

The lithographic apparatus may be of a type wherein at least a portionof the substrate may be covered by an immersion liquid having arelatively high refractive index, e.g., water, so as to fill a space 11between the projection system PS and the substrate W—which is alsoreferred to as immersion lithography. More information on immersiontechniques is given in U.S. Pat. No. 6,952,253, which is incorporatedherein by reference.

The lithographic apparatus may also be of a type having two or moresubstrate supports WT (also named “dual stage”). In such “multiplestage” machine, the substrate supports WT may be used in parallel,and/or steps in preparation of a subsequent exposure of the substrate Wmay be carried out on the substrate W located on one of the substratesupport WT while another substrate W on the other substrate support WTis being used for exposing a pattern on the other substrate W.

In addition to the substrate support WT, the lithographic apparatus maycomprise a measurement stage. The measurement stage is arranged to holda sensor and/or a cleaning device. The sensor may be arranged to measurea property of the projection system PS or a property of the radiationbeam B. The measurement stage may hold multiple sensors. The cleaningdevice may be arranged to clean part of the lithographic apparatus, forexample a part of the projection system PS or a part of a system thatprovides the immersion liquid. The measurement stage may move beneaththe projection system PS when the substrate support WT is away from theprojection system PS.

In operation, the radiation beam B is incident on the patterning device,e.g. mask, MA which is held on the mask support MT, and is patterned bythe pattern (design layout) present on patterning device MA. Havingtraversed the mask MA, the radiation beam B passes through theprojection system PS, which focuses the beam onto a target portion C ofthe substrate W. With the aid of the second positioner PW and a positionmeasurement system IF, the substrate support WT can be moved accurately,e.g., so as to position different target portions C in the path of theradiation beam B at a focused and aligned position. Similarly, the firstpositioner PM and possibly another position sensor (which is notexplicitly depicted in FIG. 1 ) may be used to accurately position thepatterning device MA with respect to the path of the radiation beam B.Patterning device MA and substrate W may be aligned using mask alignmentmarks M1, M2 and substrate alignment marks P1, P2. Although thesubstrate alignment marks P1, P2 as illustrated occupy dedicated targetportions, they may be located in spaces between target portions.Substrate alignment marks P1, P2 are known as scribe-lane alignmentmarks when these are located between the target portions C.

To clarify the invention, a Cartesian coordinate system is used. TheCartesian coordinate system has three axis, i.e., an x-axis, a y-axisand a z-axis. Each of the three axis is orthogonal to the other twoaxis. A rotation around the x-axis is referred to as an Rx-rotation. Arotation around the y-axis is referred to as an Ry-rotation. A rotationaround the z-axis is referred to as an Rz-rotation. The x-axis and they-axis define a horizontal plane, whereas the z-axis is in a verticaldirection. The Cartesian coordinate system is not limiting the inventionand is used for clarification only. Instead, another coordinate system,such as a cylindrical coordinate system, may be used to clarify theinvention. The orientation of the Cartesian coordinate system may bedifferent, for example, such that the z-axis has a component along thehorizontal plane.

Immersion techniques have been introduced into lithographic systems toenable improved resolution of smaller features. In an immersionlithographic apparatus, a liquid layer of immersion liquid having arelatively high refractive index is interposed in a space 11 between aprojection system of the apparatus (through which the patterned beam isprojected towards the substrate W) and the substrate W. The immersionliquid covers at least the part of the substrate under a final elementof the projection system PS. Thus, at least the portion of the substrateW undergoing exposure is immersed in the immersion liquid. The effect ofthe immersion liquid is to enable imaging of smaller features since theexposure radiation will have a shorter wavelength in the liquid thangas. (The effect of the immersion liquid may also be regarded asincreasing the effective numerical aperture (NA) of the system and alsoincreasing the depth of focus.)

In commercial immersion lithography, the immersion liquid is water.Typically the water is distilled water of high purity, such asUltra-Pure Water (UPW) which is commonly used in semiconductorfabrication plants. In an immersion system, the UPW is often purifiedand it may undergo additional treatment steps before supply to theimmersion space 11 as immersion liquid. Other liquids with a highrefractive index can be used besides water can be used as the immersionliquid, for example: a hydrocarbon, such as a fluorohydrocarbon; and/oran aqueous solution. Further, other fluids besides liquid have beenenvisaged for use in immersion lithography.

In this specification, reference will be made in the description tolocalized immersion in which the immersion liquid is confined, in use,to the space 11 between the final element and a surface facing the finalelement. The facing surface is a surface of substrate W or a surface ofthe supporting stage (or substrate support WT) that is co-planar withthe surface of the substrate W. (Please note that reference in thefollowing text to surface of the substrate W also refers in addition orin the alternative to the surface of the substrate support WT, unlessexpressly stated otherwise; and vice versa). A fluid handling structure12 present between the projection system PS and the substrate support WTis used to confine the immersion liquid to the immersion space 11. Thespace 11 filled by the immersion liquid is smaller in plan than the topsurface of the substrate W and the space 11 remains substantiallystationary relative to the projection system PS while the substrate Wand substrate support WT move underneath.

Other immersion systems have been envisaged such as an unconfinedimmersion system (a so-called ‘All Wet’ immersion system) and a bathimmersion system. In an unconfined immersion system, the immersionliquid covers more than the surface under the final element. The liquidoutside the immersion space 11 is present as a thin liquid film. Theliquid may cover the whole surface of the substrate W or even thesubstrate W and the substrate support WT co-planar with the substrate W.In a bath type system, the substrate W is fully immersed in a bath ofimmersion liquid.

The fluid handling structure 12 is a structure which supplies theimmersion liquid to the immersion space 11, removes the immersion liquidfrom the space 11 and thereby confines the immersion liquid to theimmersion space 11. It includes features which are a part of a fluidsupply system. The arrangement disclosed in PCT patent applicationpublication no. WO 99/49504 is an early fluid handling structurecomprising pipes which either supply or recover the immersion liquidfrom the space 11 and which operate depending on the relative motion ofthe stage beneath the projection system PS. In more recent designs, thefluid handling structure extends along at least a part of a boundary ofthe space 11 between the final element of the projection system PS andthe substrate support WT or substrate W, so as to in part define thespace 11.

The fluid handing structure 12 may have a selection of differentfunctions. Each function may be derived from a corresponding featurethat enables the fluid handling structure 12 to achieve that function.The fluid handling structure 12 may be referred to by a number ofdifferent terms, each referring to a function, such as barrier member,seal member, fluid supply system fluid removal system, liquidconfinement structure, etc.

As a barrier member, the fluid handling structure 12 is a barrier to theflow of the immersion liquid from the space 11. As a liquid confinementstructure, the structure confines the immersion liquid to the space 11.As a seal member, sealing features of the fluid handling structure forma seal to confine the immersion liquid to the space 11. The sealingfeatures may include an additional gas flow from an opening in thesurface of the seal member, such as a gas knife.

In an embodiment the fluid handling structure 12 may supply immersionfluid and therefore be a fluid supply system.

In an embodiment the fluid handling structure 12 may at least partlyconfine immersion fluid and thereby be a fluid confinement system.

In an embodiment the fluid handling structure 12 may provide a barrierto immersion fluid and thereby be a barrier member, such as a fluidconfinement structure.

In an embodiment the fluid handling structure 12 may create or use aflow of gas, for example to help in controlling the flow and/or theposition of the immersion fluid.

The flow of gas may form a seal to confine the immersion fluid so thefluid handling structure 12 may be referred to as a seal member; such aseal member may be a fluid confinement structure.

In an embodiment, immersion liquid is used as the immersion fluid. Inthat case the fluid handling structure 12 may be a liquid handlingsystem. In reference to the aforementioned description, reference inthis paragraph to a feature defined with respect to fluid may beunderstood to include a feature defined with respect to liquid.

A lithographic apparatus has a projection system PS. During exposure ofa substrate W, the projection system PS projects a beam of patternedradiation onto the substrate W. To reach the substrate W, the path ofthe radiation beam B passes from the projection system PS through theimmersion liquid confined by the fluid handling structure 12 between theprojection system PS and the substrate W. The projection system PS has alens element, the last in the path of the beam, which is in contact withthe immersion liquid. This lens element which is in contact with theimmersion liquid may be referred to as ‘the last lens element’ or “thefinal element”. The final element is at least partly surrounded by thefluid handling structure 12. The fluid handling structure 12 may confinethe immersion liquid under the final element and above the facingsurface.

FIGS. 2 a and 2 b show different features which may be present invariations of fluid handling structure 12. The designs may share some ofthe same features as FIGS. 2 a and 2 b unless described differently. Thefeatures described herein may be selected individually or in combinationas shown or as required.

FIG. 2 a shows a fluid handling structure 12 around the bottom surfaceof a final element 100. The final element 100 has an invertedfrustoconical shape. The frustoconical shape has a planar bottom surfaceand a conical surface. The frustoconical shape protrudes from a planarsurface and has a bottom planar surface. The bottom planar surface isthe optically active portion of the bottom surface of the final element100, through which the radiation beam B may pass. The final element 100may have a coating 30. The fluid handling structure 12 surrounds atleast part of the frustoconical shape. The fluid handling structure 12has an inner-surface which faces towards the conical surface of thefrustoconical shape. The inner-surface and the conical surface havecomplementary shape. A top surface of the fluid handling structure 12 issubstantially planar. The fluid handling structure 12 may fit around thefrustoconical shape of the final element 100. A bottom surface of thefluid handling structure 12 is substantially planar and in use thebottom surface may be parallel with the facing surface of the substratesupport WT and/or substrate W. The distance between the bottom surfaceand the facing surface may be in the range of 30 to 500 micrometers,desirably in the range of 80 to 200 micrometers.

The fluid handling structure 12 extends closer to the facing surface ofthe substrate W and substrate support WT than the final element 100. Aspace 11 is therefore defined between the inner surface of the fluidhandling structure 12, the planar surface of the frustoconical portionand the facing surface. During use, the space 11 is filled withimmersion liquid. The immersion liquid fills at least part of a bufferspace between the complementary surfaces between the final element 100and the fluid handling structure 12, in an embodiment at least part ofthe space between the complementary inner-surface and the conicalsurface.

The immersion liquid is supplied to the space 11 through an openingformed in a surface of the fluid handling structure 12. The immersionliquid may be supplied through a supply opening 20 in the inner-surfaceof the fluid handling structure 12. Alternatively or additionally, theimmersion liquid is supplied from an under supply opening 23 formed inthe undersurface of the fluid handling structure 12. The under supplyopening 23 may surround the path of the radiation beam B and it may beformed of a series of openings in an array. The immersion liquid issupplied to fill the space 11 so that flow through the space 11 underthe projection system PS is laminar. The supply of the immersion liquidfrom the opening 23 under the fluid handling structure 12 additionallyprevents the ingress of bubbles into the space 11. This supply of theimmersion liquid functions as a liquid seal.

The immersion liquid may be recovered from a recovery opening 21 formedin the inner-surface. The recovery of the immersion liquid through therecovery opening 21 may be by application of an under pressure; therecovery through the recovery opening 21 as a consequence of thevelocity of the immersion liquid flow through the space 11; or therecovery may be as a consequence of both. The recovery opening 21 may belocated on the opposite side of the supply opening 20, when viewed inplan. Additionally or alternatively, the immersion liquid may berecovered through an overflow opening 24 located on the top surface ofthe fluid handling structure 12. In an embodiment, the supply andrecovery openings 20, 21 can have their function swapped (i.e. the flowdirection of liquid is reversed). This allows the direction of flow tobe changed depending upon the relative motion of the fluid handlingstructure 12 and substrate W.

Additionally or alternatively, immersion liquid may be recovered fromunder the fluid handling structure 12 through a recovery opening 25formed in its bottom surface. The recovery opening 25 may serve to hold(or ‘pin’) a meniscus 33 of the immersion liquid to the fluid handlingstructure 12. The meniscus 33 forms between the fluid handling structure12 and the facing surface and it serves as border between the liquidspace and the gaseous external environment. The recovery opening 25 maybe a porous plate which may recover the immersion liquid in a singlephase flow. The recovery opening in the bottom surface may be a seriesof pining openings 32 through which the immersion liquid is recovered.The pining openings 32 may recover the immersion liquid in a two phaseflow.

Optionally radially outward, with respect to the inner-surface of thefluid handling structure 12, is a gas knife opening 26. Gas may besupplied through the gas knife opening 26 at elevated speed to assistliquid confinement of the immersion liquid in the space 11. The suppliedgas may be humidified and it may contain substantially carbon dioxide.Radially outward of the gas knife opening 26 is a gas recovery opening28 for recovering the gas supplied through the gas knife opening 26.Further openings, for example open to atmosphere or to a gas source, maybe present in the bottom surface of the fluid handling structure 12. Forexample, further openings may be present between gas knife opening 26and gas recovery opening 28 and/or between pining openings 32 and gasknife opening 26.

Features shown in FIG. 2 b which are common to FIG. 2 a share the samereference numbers. The fluid handling structure 12 has an inner surfacewhich complements the conical surface of the frustoconical shape. Theundersurface of the fluid handling structure 12 is closer to the facingsurface than the bottom planar surface of the frustoconical shape.

Immersion liquid is supplied to the space 11 through supply openings 34formed in the inner surface of the fluid handling structure 12. Thesupply openings 34 are located towards the bottom of the inner surface,perhaps below the bottom surface of the frustoconical shape. The supplyopenings 34 are located around the inner surface, spaced apart aroundthe path of the radiation beam B.

Immersion liquid is recovered from the space 11 through recoveryopenings 25 in the undersurface of the fluid handling structure 12. Asthe facing surface moves under the fluid handling structure 12, themeniscus 33 may migrate over the surface of the recovery opening 25 inthe same direction as the movement of the facing surface. The recoveryopenings 25 may be formed of a porous member. The immersion liquid maybe recovered in single phase. In an embodiment the immersion liquid isrecovered in a two phase flow. The two phase flow is received in achamber 35 within the fluid handling structure 12 where it is separatedinto liquid and gas. The liquid and gas are recovered through separatechannels 36, 38 from the chamber 35.

An inner periphery 39 of the undersurface of fluid handling structure 12extends into the space 11 away from the inner surface to form a plate40. The inner periphery 39 forms a small aperture which may be sized tomatch the shape and size of the radiation beam B. The plate 40 may serveto isolate the immersion liquid at either side of it. The suppliedimmersion liquid flows inwards towards the aperture, through the inneraperture and then under the plate 40 radially outwardly towards thesurrounding the recovery openings 25.

In an embodiment the fluid handling structure 12 may be in two parts asshown on the right hand side of FIG. 2 b : an inner part 12 a and anouter part 12 b. The inner part 12 a and the outer part 12 b may moverelatively to each other, in a plane parallel to facing surface. Theinner part 12 a may have the supply openings 34 and it may have theoverflow recovery 24. The outer part 12 b may have the plate 40 and therecovery opening 25. The inner part 12 a may have an intermediaterecovery 42 for recovering the immersion liquid which flows between theinner part 12 a and the outer part 12 b.

The substrate support WT comprises a substrate holder 200 which isconfigured to support the substrate W. FIG. 3 illustrates, incross-section in an upper portion and in plan in a lower portion, anedge region of the substrate holder 200 and the associated substrate W(in the upper part) according to an embodiment. The substrate holder 200comprises a main body 210 having a main body surface 212. In use themain body surface 212 faces an under surface of the substrate W.

In a central region of the main body surface 212 (to the left hand sidein FIG. 3 ), a plurality of main burls 220 project from the main bodysurface 212. Each main burl 220 has a distal end surface configured tosupport the substrate W. The main burls 220 are arranged relative toanother in a pattern, in plan. The pattern is such as to support thesubstrate W and to reduce any bowing of the substrate W towards the mainbody surface 212 to an acceptable amount.

The area in plan of each main burl 220 is relatively small compared tothe area, in plan, of the substrate W. Therefore the main burls 220contact only a small area of the under surface of the substrate W. Thisreduces the opportunity for contamination to be transferred from thesubstrate holder 200 to the substrate W.

A pressure differential across the substrate W is established. Forexample, the space between the main body 210 of the substrate holder 200and the substrate W is connected to an under pressure that is lower thana higher pressure above the substrate W. The pressure difference givesrise to a force holding the substrate W to the substrate holder 200.

In an immersion lithographic apparatus, liquid will, at least at certaintimes during exposure of the substrate W, be present adjacent an edge ofthe substrate W. Due to the under pressure between the main body 210 ofthe substrate holder 200 and the under surface of the substrate W, thisliquid will be drawn in around the edge of the substrate W and under thesubstrate W. In order to reduce occurrence of liquid being in contactwith the under surface of the substrate W and especially at the areawhere main burls 220 contact with the substrate W, a first seal member230 projecting from the main body surface 212 of the main body 210 isprovided. The first seal member 230 surrounds the plurality of mainburls 212. The first seal member 230 is configured to restrict thepassage of liquid between the substrate W and the main body surface 212radially inward past the first seal member 230. The first seal member230 is a continuous (though not necessarily uniform in cross-section)barrier surrounding the main burls 220.

One purpose of the first seal member 230 is to limit the flow of gas(which may undesirably be humid) radially inward towards the main burls220. This enables the under pressure to be generated around the mainburls 220 which is necessary for clamping the substrate W to thesubstrate holder 200. It is advantageous to allow some flow of gas overthe first seal member 230 so that when the under pressure source whichgenerates the under pressure around the main burls 220 is switched off,the substrate W can quickly be removed from the substrate holder 200. Ifthe gas flow is too low past the first seal member 230, then the timetaken for the pressure around the main burls 220 to equalize with thepressure above the substrate W, thereby releasing the substrate W, istoo high.

The first seal member 230 has an upper surface 232 which is configured,in use, to form a gap between it and the under surface of the substrateW. That is, the upper surface 232 is configured to be somewhat closer tothe main body surface 212 than the distal end surface of the main burls220. This is advantageous because this arrangement allows for gas to bedrawn in over the first seal member 230 (under the substrate W) justbefore substrate W removal whilst allowing restriction of the passage ofliquid in the same direction. This is achieved without contacting alarge area of the under surface of the substrate W which would leaddeleteriously to transfer of contamination from the first seal member230 to the substrate W. This would also make removal of the substrate Wfrom the substrate holder 200 more problematic.

The cross-sectional area of the first seal member 230, in plan, is verymuch greater than that of the main burls 220. The relatively large area,in plan, of the first seal member 230 results in a greater resistance tothe passage of liquid between the substrate W and the main body surface212 radially inward past the first seal member 230.

As can be seen in FIG. 3 , the main burl 220 which is the most radiallyoutward of the plurality of main burls 220, is quite a distance from theedge of the substrate W. In the absence of any other features supportingthe substrate W radially outward of the most radially outward main burl220, bending of an edge of the substrate W downwards can occur. This isdue to the under pressure underneath the substrate W compared to abovethe substrate W. In the present invention, in order to support thesubstrate W radially outward of the radially outward most main burl 220,a plurality minor burls 240 are provided. The minor burls 240 projectfrom the upper surface 232 of the first seal member 230. Each minor burl240 has a distal end surface configured to support the substrate W.

The plurality of minor burls 240 are provided circumferentially alongthe first seal member 230. The plurality of minor burls 240 may bespaced apart. The plurality of minor burls 240 may all be at the same orat different radial distances from the center of the substrate holder200. The cross-sectional area, in plan, of each minor burl 240 is verymuch less than that of the first seal member 220. For instance, the sumof the cross-sectional areas of the plurality of minor burls 240 on thefirst seal member 230 is very much less than the total cross-sectionalarea of the first seal member 230, for example at least 10 or 15 timesless.

Radially outwardly of the first seal member 230 are a plurality ofextraction openings 250. The extraction openings 250 are formed in themain body 210. The extraction openings 250 are connected to an underpressure source. Thereby any liquid which reaches the extractionopenings 250 is extracted through the main body 210. This means that theliquid is restricted from entering further into the space between themain body surface 212 and the substrate W. The extraction openings 250can also extract gas, for example when there is no liquid present to beextracted. A mixture of liquid and gas can be extracted through theextraction openings 250.

The extraction openings 250 are spaced apart from one another all theway around the first seal member 230. Although the extraction openings250 are illustrated in FIG. 3 as being discrete openings in the mainbody surface 212, this may not be the case. For example, a groove can beformed in the main body surface 212 and the extraction openings 250 canemerge from the main body 210 at the bottom of the groove. The groovemay be segmented with one or more openings in each segment. The segmentsmay be seen as a plurality of recesses.

By connecting the extraction openings 250 to an under pressure, liquidwhich does find its way to the edge of the substrate W can be removedthrough the extraction openings 250. Once the edge of the substrate W isno longer covered in liquid, the under surface of the substrate W isdried as the liquid is removed.

Radially outward of the extraction openings 250 is a second seal member260. The second seal member 260 surrounds the extraction openings 250.The second seal member 260 also surrounds the first seal member 230.

The second seal member 260 may be similar to the first seal member 230with an upper surface 262 from which a plurality of minor burls 270project. An advantage of providing the plurality of minor burls 270 onthe upper surface 262 of the second seal member 260 is that thesubstrate W is supported even closer to its edge. This further reducesdeformation of the substrate W due to it edge being unsupported.

Although in the embodiment of FIG. 3 minor burls 240, 270 are shown onboth of the first seal member 230 and second seal member 260, this maynot be the case. For example, minor burls 240 may only project from theupper surface 232 of the first seal member 230 or minor burls 270 mayonly project from the upper surface 262 of the second seal member 260.In both cases deformation of the substrate W is reduced compared to thecase where the minor burl 240, 270 is not present.

Although both first and second seal members 230, 260 are illustrated inFIG. 3 , it may be that only the first seal member 230 or only thesecond seal member 260 is present. If only the second seal member 260 ispresent, this arrangement can be seen as having a first seal member witha plurality of extraction openings 250 radially inward of that firstseal member. If the first seal member 230 radially inward of theextraction openings 250 is present in such an arrangement, this can beseen as being a second seal member.

In the embodiment of FIG. 3 , in use, an under pressure in a centralregion of the substrate holder 200 between the main body surface 212 andthe substrate W is provided. This under pressure is the reason thesubstrate W is clamped to the substrate holder 200. This clamping underpressure may have a lower magnitude (i.e. is a less severe vacuum) thanthe under pressure at a region adjacent to the extraction openings 250.This arrangement results in a gas flow radially outward from a positionaround the main burls 220 towards the extraction openings 250 and aradially inward flow of fluid from the edge of the substrate W towardsthe extraction openings 250. In this way, because of the gas flowradially outwardly to a position adjacent to the extraction openings250, liquid and humidified gas is constrained from moving furtherradially inward than a position of the extraction openings 250. Therebythe extent of liquid penetration under the substrate W is reduced.Because the first seal member 230 does not have liquid on it or is notpresent, removing the substrate W from the substrate holder 200 isachieved more easily, resulting in less wear. Wear is deleteriousbecause this can result in contamination of the substrate W as well as achange in the clamping characteristics of the substrate holder 200 andthereby deformation of the substrate W. The presence of liquid betweenmain burls 220 and substrate W underside can also lead to wear (if thesubstrate holder 200 is a ceramic), and possibly friction variation.Deformation of the substrate W can lead to imaging errors (e.g. overlayerrors and/or focus errors), as can contamination. The presence ofliquid on the underside of the substrate W is generally deleteriousbecause this can result in thermal stability issues of the substrate Wor difficulties when liquid droplets are lost during unloading of thesubstrate W. Therefore the substrate holder 200 of FIG. 3 alleviatessome of these difficulties by having in place extra support for thesubstrate edge, measures for maintaining the first seal member 230 dryand for preventing the ingress of liquid radially inward past theextraction openings 250. Additionally a humid atmosphere between themain body surface 212 and the substrate W is avoided by preventing theingress of liquid past the extraction openings 250. The disadvantage ofa humid atmosphere is the possibility of oxidation of the main burls220. Oxidation of the main burls 220 is deleterious as this reduces theachievable flatness of the substrate W supported by the main burls 220.

FIG. 4 shows another embodiment of a substrate holder 200 according tothe present invention. The Figure shows, in cross-section in an upperportion and in plan in a lower portion, an edge region of the substrateholder 200. The embodiment of FIG. 4 is the same as that of FIG. 3except as described below. Like reference numerals are used toillustrate corresponding features.

In the embodiment of FIG. 4 , a plurality of inlet openings 280 areformed in the main body surface 212. The inlet openings 280 are radiallyinward of the extraction openings 250. The inlet openings 280 are opento the atmosphere or connected to a gas source. As a result, a flow ofgas radially outward from the plurality of inlet openings 280 towardsthe plurality of extraction openings 250 is created. This flow of gasforms a barrier to the ingress of liquid and humid gas radially inwardsunder the substrate W. A flow of gas radially inwards from the pluralityof inlet openings 280 is also created, due to the under pressure formedin the center of the substrate holder 200 for clamping the substrate Wto the substrate holder 200. The under pressure generated in a center ofthe substrate holder 200 in a region of the main burls 220 may be of thesame magnitude as the under pressure generated above the extractionopenings 250. The under pressure at the extraction openings 250 may bedeeper (i.e. have a greater magnitude) than that at main burls 220,causing a radially outward flow over the upper surface 232 as well.

Main burls 220 (and/or minor burls 270) may be arranged alternately withthe inlet opening 280 or extraction opening 250 or between the inletopening 280 and extraction opening 250, depending on the depth of thegroove between the first seal member 230 and the second seal member 260.

The plurality of inlet openings 280 may be formed in the bottom of agroove in the main body surface 212. The groove may be in the form of acontinuous or discontinuous circumferential channel. Alternatively theplurality of inlet openings 280 may be formed as a plurality of discreteopenings in the main body surface 212, as illustrated. The number, sizeand spacing of the inlet openings 280 may be selected as appropriate.The number, size and spacing of the inlet openings 280 may be similar tothat of the extraction openings 250, as illustrated.

Because the gas which exits the inlet openings 280 can be dehumidifiedgas, this further reduces the humidity of the gas present around themain burls 220. Alternatively in the case that gas exiting the inletopenings 280 is drawn towards the extraction openings 250, humidifiedgas can be provided out of the inlet openings 280. This reducesevaporation of liquid in the resulting gas flow, thereby reducingevaporative thermal load on the underside of the substrate W and/or inextraction openings 250 and further downstream. The provision of theinlet openings 280 also allows the under pressure connected to theextraction openings 250 to be the same as that of the under pressuresurrounding the main burls 220. This is advantageous as the underpressure does not need to be lower than the under pressure surroundingthe main burls 220 thereby drawing more liquid underneath the substrateW from the edge of the substrate W, as in the embodiment of FIG. 3 .

In an embodiment, the gas flow radially inward towards the extractionopenings 250 results in a superficial liquid flow and a superficial gasflow which find a balance. This means that liquid will flow down theouter side of the through hole forming the extraction opening 250 andgas will flow on the inner side of the through hole. If any liquid ispresent this type of two phase flow will occur and a smooth flow isachievable. Desirably in the case of no liquid being present, the underpressure which is determined by the flow restrictions of the inletopenings 280 and the second seal member 260, should be higher than themaximum capillary under pressure of the second seal 260. That is, thegas flow is great enough to overcome capillary pressure of liquid in thegap between the upper surface 262 and the substrate W. If this conditionis met, then the gas flow over the second seal member 260 should alwaysbe enough to remove any liquid present between the upper surface 262 ofthe second seal member 260 and the substrate W. This is desirable as itallows removal of the substrate W without needing to overcome attractionto the substrate holder 200 due to liquid being present between thesecond seal member 260 and the substrate W. No liquid is present betweenthe first seal member 230 and the substrate W, as described above. Theabsence of liquid between the first and second seal member 230, 260 andthe substrate W will also increase flatness of the substrate W.

FIG. 5 illustrates a further embodiment which is the same as theembodiment of FIG. 4 except as described below.

In the embodiment of FIG. 5 the second seal member 260 has a largerwidth in the radial direction than that of the first seal member 230.The extraction openings 250 are formed in the upper surface 262 of thesecond seal member 260. As illustrated, a groove 252 is formed in theupper surface 262 of the second seal member 260 and the extractionopenings 250 are formed in the bottom of the groove 252.

As illustrated in FIG. 5 two minor burls 270 are formed on the uppersurface 262 of the second seal member 260, on either side of theextraction openings 250. Such minor burls 270 may or may not be presentand they may be on only the radial inner side or only on the radialouter side of the extraction openings 250. The radial inner and outerminor burls 270 on the second seal member 260 may be lined up in theradial direction, as illustrated, or may be staggered relative to oneanother in the radial direction.

In one sense the embodiment of FIG. 5 can be seen as having three sealmembers, the first seal member 230, a seal member on the radially inwardside of the extraction openings 250 and a third seal member radiallyoutward of the extraction openings 250. This would be more apparent ifthe groove 252 were so deep that its bottom surface was substantiallycoplanar with the main body surface 212 of the main body 210. In thisview it can be seen that the middle seal member is positioned betweenthe inlet openings 280 and the extraction openings 250 as well asbetween the first seal member 230 and the second seal member 260.

Main burls 220 (and/or minor burls 270) may be arranged alternately withthe inlet opening 280 or extraction opening 250.

An advantage of the FIG. 5 embodiment is that a flow of gas radiallyoutwardly from the inlet openings 280 to the extraction openings 250passes over the constriction between the upper surface 262 of theradially inward part of the second seal member 260 and the substrate W.This results in an acceleration of the gas flow, thereby enhancing thesealing capability because any liquid which does find its way radiallyinward of extraction openings 250 is pushed by the accelerated gas flowback radially outwards towards the extraction opening 250 if the forcegenerated by the gas flow is greater than the capillary force of theliquid between the upper surface 232 and the substrate W. =

In the embodiment of FIG. 5 , instead of or in addition to theextraction openings 250 being positioned in the second seal member 260,the plurality of inlet openings 280 can be positioned in the first sealmember 230. This arrangement has similar advantages to the arrangementillustrated in FIG. 5 as the gas flow radially outward from the inletopenings 280 towards the extraction openings 250 must pass through thenarrow gap between the first seal member 230 and the substrate W so thatthe gas flow is accelerated thereby enhancing the sealing capability ofthe arrangement.

In an alternative embodiment, the groove 252 may be replaced with aplurality of recesses similar to the recesses 284 described below withreference to FIG. 6 and the inlet openings 280.

The embodiment of FIG. 6 is the same as the embodiment of FIG. 5 exceptas described below.

In the embodiment of FIG. 6 the arrangement of the extraction openings250 in the bottom of a groove 252 formed in the upper surface 262 of thesecond seal member 260 is the same as in the embodiment of FIG. 5 .However instead of the inlet openings 280 being provided in the bottomof a deep recess between the first seal member 230 and second sealmember 260, the inlet openings 280 in the embodiment of FIG. 6 areprovided at the bottom of individual recesses 284 formed in the uppersurface 232 of the first seal member 230. This embodiment can be viewedas having a first seal member 230 in which the inlet openings 280 areformed, a second seal member 260 with no inlets or openings formed init, and a shallow groove 252 with extraction openings 250 formed in thebottom of the groove 252 between the first seal member 230 and secondseal member 260.

The recesses 284 are a pressure divider and make the gas flow moredefined in position. Additionally the recesses 284 create a tangentialflow between the inlet openings 280. This tangential flow can removeliquid from between the inlet openings 280. This effect is also achievedwith the groove 252.

Although the arrangement illustrated shows that each recess 284 has acorresponding inlet opening 280, the arrangement may be differentwhereby one recess 284 has two or more associated inlet openings 280.

In this and all other embodiments the minor burls 240 may be arrangedalternately with the inlet openings 280, rather like the outer burls 300being arranged alternately with the extraction openings 250 in theembodiment of FIG. 9 described below. Additionally or alternatively theminor burls 240 may be positioned radially inwardly and/or radiallyoutwardly of the inlet openings 280, as well as in a line at the sameradial distance from the center of the substrate holder 200 as the inletopenings 280.

The embodiment of FIG. 7 is the same as the embodiment of FIG. 5 or 6except as described below.

In FIG. 7 a groove 290 is formed in the upper surface 232 of the firstseal member 230. The groove 290 does not have any openings formed in itsbottom surface.

As can be seen in the lower half of FIG. 7 , the groove 290 may have ashape to form a labyrinth seal for the first passage of gas fromradially outward of the first seal member 230 to radially inward of thefirst seal member 230. That is, the groove 290 extends from a radiallyinward side of the first seal 230 to a radially outward side of thefirst seal member 230 following a tortuous path. As with all the otherembodiments, the main burls 220 and/or minor burls 240, 270 may bearranged alternately with (and/or radially inwards/outwards of) theinlet opening 280 and/or extraction openings 250.

FIG. 8 illustrates an embodiment which is the same as the embodiment ofFIG. 5 except as described below.

In the embodiment of FIG. 8 instead of having the extraction openings250 formed in the upper surface 262 of the second seal member 260 andthe inlet openings 280 formed between the first seal member 230 andsecond seal member 260, the extraction openings 250 are formed betweenthe first seal member 230 and second seal member 260 and the inletopenings 280 are formed in the upper surface 232 of the first sealmember 230. Like with the embodiment of FIG. 5 this can be seen as athree seal member embodiment. A continuous groove or individual recessesmay or may not be provided in the upper surface 232 of the first sealmember 230 with the inlet openings 280 formed in the bottom surface ofthe groove or individual recesses like shown and described withreference to FIG. 5 around the extraction openings 250. Minor burls 240may be provided on the upper surface 232 of the first seal member 230 onone or both radially inward and outward sides of the extraction openings280 (or alternatingly). Like the minor burls 270 on the second sealmember 260 of the FIG. 5 embodiment, the minor burls 240 may or may notbe radially aligned.

FIG. 9 illustrates an embodiment which is the same as the embodiment ofFIG. 8 except as described below.

In the embodiment of FIG. 9 , a meniscus pinning feature 291 is providedin the upper surface 232 of the first seal member 230. The meniscuspinning feature 291 extends around the region of the main burls 220. Themeniscus pinning feature 291 is radially outward of the inlet openings280. The meniscus pinning feature 291 is radially inward of theextraction openings 250.

The meniscus pinning feature 291 has a feature, for example a sharp edge292, which is effective to pin a meniscus of liquid in place. Themeniscus pinning feature 291 applies a force to the meniscus meaningthat extra energy is required for the meniscus to move past the meniscuspinning feature 291. In this way, a further barrier to the radiallyinward movement of liquid is present.

As with the embodiment of FIG. 8 , the minor burls 240 may be in anyposition on the upper surface 232 of the first seal member 230.Additionally or alternatively minor burls 270 may be present on theupper surface 262 of the second seal member 260.

In the embodiment of FIG. 9 the extraction openings 250 are held at anunderpressure which is greater than the underpressure applied in theregion of the main burls 220. In an embodiment an underpressure is alsoapplied to the inlet openings 280. The underpressure applied to inletopenings 280 has a magnitude which is between that of the underpressureapplied in the region of the main burls 220 and that applied to theextraction openings 250. In this way, a flow of gas is generatedradially outwardly past the inlet openings 280. This radially outwardflow of gas presents another force on the meniscus of liquid between thesubstrate W and the substrate holder 200.

Although the meniscus pinning feature 291 is illustrated as a groovewith a sharp edge 292, any feature which functions as a meniscus pinningfeature 290 may be used. An alternative feature may be a change incontact angle of the upper surface 262 with the immersion liquid at theposition of the meniscus pinning feature 291.

A meniscus pinning feature 291 such as that illustrated in FIG. 9 couldbe used in any of the other embodiments. The position of the meniscuspinning feature 291 is best located radially inwardly of the extractionopenings 250.

The embodiment of FIG. 10 is the same as the embodiment of FIG. 3 exceptas described below.

In the embodiment of FIG. 10 minor burls 240, 270 are optional features.Instead or additionally, in order to support the edge of the substrate Wradially further outward than the outer most main burl 220, a pluralityof outer burls 300 are provided radially outward of the first sealmember 230. The plurality of outer burls 300 project from the main bodysurface 212. Each of the plurality of outer burls 300 has a distal endsurface configured to support the substrate W. The plurality of outerburls 300 may be provided radially inward of the second seal member 260,as illustrated. In one embodiment the plurality of outer burls 300 arearranged alternately with the extraction openings 250 in a linesurrounding the first seal member 230 and the main burls 220.

In this way the edge of the substrate W has a support. This can reducedeformation of the substrate W at its outer edge. In an embodiment theouter burls 300 may be positioned radially outward of the second sealmember 260. An outer burl 300 such as that illustrated in FIG. 10 mayoptionally be provided in the embodiments as described with reference toFIGS. 3-9 and 11-13 .

FIG. 11 illustrates an embodiment which is the same as the embodiment ofFIG. 10 except as described below.

The variation in the geometry of the first seal member 230 and/or secondseal member 260 illustrated in FIG. 11 and described below can beapplied to the first seal member 230 and/or second seal member 260 ofany of the embodiments.

In the embodiment of FIG. 11 , as can be seen in the lower portion ofthat Figure, the second seal member 260 follows a meandering path aroundthe circumference of the substrate holder 200. As also illustrated inFIG. 11 , minor burls 240 are formed on the top surface 232 of the firstseal member 230. The minor burls 240 are positioned at apexes, forexample where adjacent concave curved portions 320 meet. Thus, theplurality of minor burls 240 project from parts of the first seal member230 which extend further from the center of the substrate holder 200than other parts of the first seal member 230. The first seal member 230and the second seal member 260 may have any shape. What is desirable isthat the minor burls 240 positioned on the first seal member 230 arepositioned on a circumferential line which has an equal area of thegroove between the first seal member 230 and second seal member 260radially inwards of it as radially outward of it. Therefore theunderpressure generated between the first seal member 230 and the secondseal member 260 is equal on either side of the line of minor burls 240,so that no great bending moment is introduced due to the largeunderpressure in the area between the first seal member 230 and secondseal member 260.

In one embodiment, the first seal member 230 is formed by a plurality ofconcave curved portions 320 joined together. In one embodiment, thesecond seal member 260 has an overall shape, in plan, which is definedby a plurality of curved portions 310 having a smaller radius than theoverall shape, which are joined together thereby to form the overallshape. The second seal member 260 is formed of a plurality of convexcurved portions 310 (relative to the radial direction from inward tooutward of the substrate holder 200).

Inlet openings 280 may also be provided, for example radially inward ofthe extraction openings 250 between the first seal member 230 and thesecond seal member 260.

The embodiment of FIG. 12 incorporates features of the embodiment ofFIG. 6 as well as the embodiment of FIG. 11 .

The embodiment of FIG. 12 has a single seal member 230. The single sealmember 230 is shown in plan in the middle of FIG. 12 and incross-section on the left and right hand sides of FIG. 12 . The lefthand cross-section is through line A-A illustrated in the plan view ofFIG. 12 . The right had side of FIG. 12 illustrates the cross-sectionthrough line B-B in the plan view of FIG. 12 .

The seal member 230 includes a plurality of inlet openings 280 in theupper surface 232. Extraction openings 250 are also formed in the uppersurface 232 of the seal member 230. The inlet openings 280 may beconnected to an ambient pressure source or an underpressure which thehas a lower magnitude than an underpressure to which extraction openings250 are connected.

In the embodiment of FIG. 12 one or more first recesses 510 are formedin the upper surface 232 of the seal member 230. Each of the firstrecesses 510 has at least one associated extraction opening 250. Howeverthere may be more than one extraction opening 250 in the or each firstrecess 510.

One or more second recesses 520 are formed in the upper surface 232 ofthe seal number 230. Each of the second recesses 520 has one or morecorresponding inlet opening 280 formed in it. However there may be morethan one inlet opening 280 in the or each second recess 520.

The first and second recesses 510, 520 are shaped and positioned toresult in a barrier 550 being formed between the first recesses 510 andthe second recesses 520. The barrier 550 is configured to restrict thepassage of liquid between the substrate W and the main body surface 212radially inwardly past the barrier 550.

Due to the relatively higher pressure of gas in the inlet openings 280,gas is sucked out of the inlet openings 280 over the barrier 550 towardsthe extraction openings 250. This flow of gas is accelerated as itpasses over the barrier 550, thereby forming an effective gas sealbetween the barrier 550 and the underside of the substrate W. The gasflow advantageously has a tangential component from the inlet openings280 towards the extraction openings 250 so as to direct radiallyincoming fluid towards the extraction openings 250.

The relative positioning of the plurality of extraction openings 250 andinlet openings 280 and the size and shape of the barrier 550 result inthe fluid flows illustrated by arrows in the plan view of FIG. 12 . Thatis, due to the underpressure applied to the extraction openings 250,fluid is sucked from radially outside of the seal member 230 into theextraction openings 250 and focused by tangential movement towards theextraction openings 250.

In an embodiment, first extensions 560 extend from the barrier 550radially outwardly. Second extensions 570 extend from the barrier 550radially inwardly. The first extension 560 and the second extension 570are effective to define sidewalls of the first recess 510 and the secondrecess 520, respectively. The first extension 560 bridges from thebarrier 550 to a radially outer portion of the seal member 230. Thesecond extension 570 bridges from the barrier 550 to a radially innerportion of the seal member 230.

The inlet openings 280 and extraction openings 250 alternate in thecircumferential direction such that gas drawn out of an inlet opening280 flows towards extraction openings 250 on either side of that inletopening 280. In this way a tangential flow of gas is achievedsubstantially around the entire circumference of the seal member 230resulting in superior sealing properties.

Due to each extraction opening 250 being formed in a first recess 510,and the extraction openings 250 being spaced closely next to each otheraround the circumference of the seal member 230, the force experiencedby the substrate W due to the underpressure applied to the extractionopenings 250 is evened out in the circumferential direction resulting inlower deformation of the substrate W.

Due to the inlet openings 280 being positioned in the bottom of acorresponding second recess 520, the gas flow out of the inlet openings280 is spread out over a larger area of the barrier 550 than if theinlet openings 280 were not formed in a second recess 520.

Optionally the inlet openings 280 are spaced radially outward of theextraction openings 250. This helps in splitting of the radiallyincoming fluid flow into two streams towards adjacent extractionopenings 250. This splitting of the fluid flow towards one of twoextraction openings 250 is also aided by the shape of the barrier 550and also the (optional) presence of the first extensions 560, explainedfurther below.

So that the extraction openings 250 may be radially inward of the inletopenings 280, the one or more first recesses 510 extend radially inwardso that the innermost part of the first recesses 510 is closer to thecenter of the substrate holder 200 than the outermost part of the one ormore second recesses 520. The shape of the first recess 510 and thesecond recess 520 includes a tangential narrowing towards the center ofthe substrate W in the case of the first recesses 510 and away from thecenter of the substrate W in the case of second recesses 520.

The barrier 550 can be seen as forming a side wall of the first recesses510 on one side (radially outward) and a side wall of the second recess520 on the other side (radially inward). The side wall is formed by setsof first portion 552 and second portion 554 of the barrier 550.

The first portion 552 and the second portion 554 of a set converge onone another towards a respective first apex 556 as the first portion 552and the second portion 554 extend in the radially inward direction. Bypositioning one of the plurality of extraction openings 250 adjacent thefirst apex 556, the flow of fluid radially inwardly is directed by thefirst portion 552 and the second portion 554 as well as by the flow ofgas from the inlet openings 280 towards the extraction openings 250.This directing of the flow of fluid towards the extraction openings 250results in better extraction efficiency of the extraction openings 250.The flow of gas is also aided by the first extension 510 as this forms atangential barrier to the flow of fluid.

First portion 552 and second portion 554 of adjacent sets also convergeon one another towards a respective second apex 558 of the barrier 550as the first portion 552 and the second 554 portion extend in theradially outward direction. Advantageously each of the second apexes 558has an associated inlet opening 280.

The first extensions 560 extend from the second apexes 558. The secondextensions 570 extend from the first apexes 556.

Also helping with guiding of the fluid flow towards the extractionopenings 250 is the overall shape, in plan, of the seal member 230. Thatis, a radially outer most part of the seal member 230 varies in distancefrom the center of the substrate holder 200. This results in the wavypattern illustrated in the plan view of FIG. 12 . The extractionopenings 250 are positioned circumferentially aligned with parts of theseal member 230 which extend further from the center of the substrateholder 200 than other parts of the seal member 230. That is, animaginary line (such as line A-A) passing through the center of thesubstrate holder 200 passes through an extraction opening 250 andthrough a radially outer most part of the seal member 230. A similararrangement is optionally made, as illustrated, on the inner surface ofthe seal member 230 with the inlet openings 280 being radially alignedwith parts of the seal member 230 which extend closer to the substrateholder 200 than other parts of the seal member 230.

Although not illustrated, the seal member 230 of the embodiment of FIG.12 may comprise a plurality of minor burls 240, such as discussed inconnection with the other embodiments of the present invention. Theminor burls 240 may be positioned radially inwardly and/or radiallyoutwardly of the extraction openings 250 and/or inlet openings 280 ormay be positioned substantially in line with the inlet openings 280and/or extraction openings 250.

The embodiment of FIG. 13 is the same as the embodiment of FIG. 12except that only a single first recess 510 is formed. That is, the firstextension 560 is missing. Alternatively or additionally the secondextension 570 may be missing.

Embodiments are provided according to the following clauses:

-   -   1. A substrate holder for use in a lithographic apparatus and        configured to support a substrate, the substrate holder        comprising:        -   a main body having a main body surface;        -   a plurality of main burls projecting from the main body            surface, wherein each main burl has a distal end surface            configured to support the substrate;            a first seal member projecting from the main body surface            and having an upper surface, the first seal member            surrounding the plurality of main burls and configured to            restrict the passage of liquid between the substrate and the            main body surface radially inward past the first seal            member; and            a plurality of minor burls projecting from the upper surface            of the first seal member, wherein each minor burl has a            distal end surface configured to support the substrate.    -   2. The substrate holder of clause 1, further comprising a        plurality of extraction openings formed in the main body for the        extraction of fluid into the main body from between the main        body and the substrate.    -   3. The substrate holder of clause 2, wherein the plurality of        extraction openings are arranged radially outward of the first        seal member, and/or wherein the substrate holder further        comprising a second seal member projecting from the main body        surface, the second seal member having an upper surface and        surrounding the plurality of main burls and configured for        restricting the passage of liquid between the substrate and the        main body surface radially inward past the second seal member.    -   4. The substrate holder of clause 3, wherein the second seal        member surrounds the first seal member, and preferably wherein        the substrate holder further comprises a plurality of second        minor burls projecting from an or the upper surface of the        second seal member, and each second minor burl has a distal end        surface configured to support the substrate, and preferably        wherein the plurality of extraction openings are in the upper        surface of the second seal member.    -   5. The substrate holder of clause 4, wherein each extraction        opening is formed at a bottom surface of an extraction groove        formed in the second seal member or wherein each extraction        opening is formed at a bottom surface of a corresponding recess        formed in the upper surface of the second seal member.    -   6. The substrate holder of clause 2, wherein the plurality of        extraction openings are arranged radially inward of the first        seal member.    -   7. The substrate holder of clause 2 or clause 6, further        comprising a second seal member projecting from the main body        surface, the second seal member surrounding the plurality of        main burls and configured for restricting the passage of liquid        between the substrate and the main body surface radially inward        past the second seal member.    -   8. The substrate holder of clause 7, wherein the first seal        member surrounds the second seal member, and/or wherein the        second seal member has an upper surface and the substrate holder        further comprises a plurality of second minor burls projecting        from the upper surface of the second seal member, wherein each        second minor burl has a distal end surface configured to support        the substrate.    -   9. The substrate holder of any of clause 4, clause 6, clause 7        or clause 8, wherein the plurality of extraction openings are in        the main body surface between the first seal member and the        second seal member.    -   10. The substrate holder of any of clauses 2 to 9, further        comprising a plurality of outer burls projecting from the main        body surface, wherein each outer burl has a distal end surface        configured to support the substrate, the outer burls being        radially outward of the first seal member, and preferably        wherein the outer burls and the extraction openings are arranged        alternately in a line surrounding the first seal member and the        plurality of main burls.    -   11. The substrate holder of any of clauses 2 to 10, further        comprising a plurality of inlet openings formed in the main body        for the drawing therethrough of gas to a space between the        substrate and the main body, and preferably wherein the        substrate holder further comprising a plurality of inlet        openings formed in the main body for the drawing therethrough of        gas to a space between the substrate and the main body.    -   12. The substrate holder of clause 11, wherein the plurality of        inlet openings are formed in the main body surface radially        outward of the first seal member, or wherein the plurality of        inlet openings are in the upper surface of the first seal        member, and preferably wherein the plurality of inlet openings        are provided at the bottom of individual recesses formed in the        upper surface of the first seal member.    -   13. The substrate holder of any of clauses 1 to 12, further        comprising a groove formed in the upper surface of the first        seal member, wherein the groove provides a tortuous path for gas        from a radially outward side of the first seal member to a        radially inward side of the first seal member, and/or wherein        the first seal member has an overall shape, in plan, such that a        radially outer most part of the first seal member varies in        distance from the center of the substrate holder around its        circumference and wherein the plurality of minor burls project        from parts of the first seal member which extend further from        the center of the substrate holder than other parts of the first        seal member.    -   14. The substrate holder of any of clauses 1 to 13, further        comprising a meniscus pinning feature on the upper surface of        the first seal member.    -   15. A lithographic apparatus including a substrate holder of any        of clauses 1-14.

Although specific reference may be made in this text to the use of alithographic apparatus in the manufacture of ICs, it should beunderstood that the lithographic apparatus described herein may haveother applications. Possible other applications include the manufactureof integrated optical systems, guidance and detection patterns formagnetic domain memories, flat-panel displays, liquid-crystal displays(LCDs), thin-film magnetic heads, etc.

Although specific reference may be made in this text to embodiments ofthe invention in the context of a lithographic apparatus, embodiments ofthe invention may be used in other apparatus. Embodiments of theinvention may form part of a mask inspection apparatus, a metrologyapparatus, or any apparatus that measures or processes an object such asa wafer (or other substrate) or mask (or other patterning device). Theseapparatus may be generally referred to as lithographic tools. Such alithographic tool may use vacuum conditions or ambient (non-vacuum)conditions.

Although specific reference may have been made above to the use ofembodiments of the invention in the context of optical lithography, itwill be appreciated that the invention, where the context allows, is notlimited to optical lithography and may be used in other applications,for example imprint lithography.

While specific embodiments of the invention have been described above,it will be appreciated that the invention may be practiced otherwisethan as described. The descriptions above are intended to beillustrative, not limiting. Thus it will be apparent to one skilled inthe art that modifications may be made to the invention as describedwithout departing from the scope of the claims set out below.

1.-15. (canceled)
 16. A substrate holder for use in a lithographicapparatus and configured to support a substrate, the substrate holdercomprising: a main body having a main body surface; a plurality of firstburls projecting from the main body surface, each first burl having adistal end surface configured to support the substrate; a first sealmember projecting from the main body surface at an edge region of themain body and having an upper surface, the first seal member surroundingthe plurality of first burls; a plurality of second burls arrangedoutwards, relative to a central portion of the main body, of the firstseal member, each second burl having a distal end surface configured tosupport the substrate; a second seal member projecting from the mainbody surface at the edge region of the main body, the second seal membersurrounding the first seal member and the plurality of second burls; anda plurality of extraction openings formed in the main body for theextraction of fluid into the main body from between the main body andthe substrate, wherein the substrate holder is configured such that anunder pressure at the extraction openings is stronger than that at theplurality of first burls, causing an outward flow over the upper surfaceof the first seal member.
 17. The substrate holder of claim 16, whereinthe second seal member has a larger width in the outward direction thanthat of the first seal member.
 18. The substrate holder of claim 16,wherein a middle seal member is formed between the first seal member andthe second seal member, and a groove is formed between the middle sealmember and the second seal member.
 19. The substrate holder of claim 18,wherein the groove has a bottom surface which is substantially co-planarwith the main body surface.
 20. The substrate holder of claim 18,wherein the plurality of extraction openings are formed in the groovebetween the middle seal member and the second seal member and/or whereinthe plurality of extraction openings are formed radially outwards of themiddle seal member.
 21. The substrate holder of claim 16, furthercomprising a plurality of inlet openings formed in the main body inward,relative to the central portion of the main body, of the plurality ofextraction openings, the plurality of inlet openings open to theatmosphere or connected to a vacuum or gas source.
 22. The substrateholder of claim 21, wherein the plurality of inlet openings are formedin a groove between the first seal member and the second seal member orwherein the plurality of inlet openings are formed in the first sealmember.
 23. The substrate holder of claim 21, wherein the plurality ofinlet openings is connected to a vacuum source, and wherein an underpressure applied to the plurality of inlet openings has a magnitudewhich is between the under pressure in the region of the plurality offirst burls and the under pressure at the plurality of extractionopenings.
 24. The substrate holder of claim 16, wherein the plurality ofextraction openings are formed between the first seal member and thesecond seal member.
 25. The substrate holder of claim 16, wherein theextraction openings and second burls are arranged alternately in a linesurrounding the first seal member and the plurality of first burls. 26.A lithographic apparatus comprising: a projection system configured totransfer a pattern toward a substrate; and the substrate holder of claim16.
 27. A substrate holder for use in a lithographic apparatus andconfigured to support a substrate, the substrate holder comprising: amain body having a main body surface; a plurality of burls projectingfrom the main body surface, each burl having a distal end surfaceconfigured to support the substrate; a first seal member projecting fromthe main body surface at an edge region of the main body, the first sealmember located outwards, relative to a central portion of the main body,of the plurality of burls; a plurality of inlet openings formed in themain body and located outwards, relative to the central portion of themain body, of the first seal member, the plurality of inlet openingsopen to the atmosphere or connected to a gas source; a second sealmember projecting from the main body surface at the edge region of themain body, the second seal member located outwards, relative to thecentral portion of the main body, of the plurality of inlet openings; aplurality of extraction openings formed in the main body for theextraction of two phase fluid comprising liquid and gas into the mainbody from between the main body and the substrate, each extractionopening formed by a through hole having an inner side and an outer side;and a third seal member projecting from the main body surface at theedge region of the main body and located outwards, relative to thecentral portion of the main body, of the plurality of extractionopenings, wherein the plurality of extraction openings is configuredsuch that the liquid flows on the outer side of the through hole and thegas flows on the inner side of the through hole.
 28. The substrateholder according to claim 27, further comprising a plurality of burlsprojecting from an upper surface of at least one selected from: thefirst seal member, the second seal member and/or the third seal member,each burl projecting from the upper surface having a distal end surfaceconfigured to support the substrate.
 29. The substrate holder accordingto claim 27, further comprising a plurality of further burls locatedoutwards, relative to the central portion of the main body, of an inwardside of the first seal member, each further burl having a distal endsurface configured to support the substrate and the further burlsarranged alternately with the plurality of inlet openings or theplurality of extraction openings.
 30. The substrate holder according toclaim 27, wherein the plurality of extraction openings is arranged in agroove between the second seal member and the third seal member.
 31. Thesubstrate holder according to claim 27, wherein the second seal memberhas a larger width in the outwards direction than that of the first sealmember.
 32. The substrate holder according to claim 27, wherein theplurality of inlet openings is configured such that a flow of gasradially outwardly from the plurality of inlet openings to the pluralityof extraction openings passes over a constriction between an uppersurface of the second seal member and the substrate.
 33. The substrateholder according to claim 27, further comprising at least one burlarranged outwards, relative to the central portion of the main body, ofthe second seal member, the at least one burl having a distal endsurface configured to support the substrate.
 34. The substrate holderaccording to claim 27, further comprising a groove formed in an uppersurface of the first seal member, wherein the groove provides a tortuouspath for gas from an outward side, relative to the central portion ofthe main body, of the first seal member to an inward side, relative tothe central portion of the main body, of the first seal member.
 35. Alithographic apparatus comprising: a projection system configured totransfer a pattern toward a substrate; and the substrate holder of claim27.